Alternative Process Chemistries and Chemical Recycling
نویسندگان
چکیده
Decreasing feature size, low cost, and high yield continue to drive the silicon electronics industry. Perfect atomic surface silicon is therefore needed to manufacture high yield devices of submicron dimensions. In addition, there are rising environmental concerns, and EPA regulation is broadening its control over industrial environment. The solution to maintain traditional low cost wet cleaning is to investigate environmentally benign alternative chemistries and improve the effectiveness of this cleaning technology simultaneously.
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